​國際期刊 (SCI, EI):

1. Chun-Hung Liu*, Ze-An Ding, Shun-Ping Wang, “Shape-based proximity effect correction method for throughput, fidelity, and contrast enhancement of electron-beam writer,” Applied Physics Express, Volume 16, Number 1, 011001, Jan. 2023 (SCI) [SCI, IF=2.895, Engineering 38/297=13% (Q1), Scopus] (另兩位作者為本人指導之學生)

2. Chun-Hung Liu*, Hsiang-Yi Hsieh, “Low-voltage electron scattering in advanced extreme ultraviolet masks,” Japanese Journal of Applied Physics, Volume 61, Number 8, 081002, Aug. 2022 (SCI) [SCI, IF=1.491, Engineering 97/297=32.6% (Q2), Scopus] (另一位作者為本人指導之學生)

3. Chien-Lin Lee, Sheng-Wei Chien, Kuen-Yu Tsai*, Chun-Hung Liu, “Investigation on helium ion beam lithography with proximity effect correction,” Journal of Micro/Nanopatterning, Materials, and Metrology, Volume 20, Number 3, 033201, Jul. 2021 (SCI) [SCI, IF=1.22, Engineering 120/246=48% (Q2), Scopus]

4. Hsuan-Ping Lee, Sheng-Yung Chen, Chun-Hung Liu, Ding-Qi, Yu-Tian Shen, and Kuen-Yu Tsai*, “Design of an electron-optical system with a ball-tip emission source through a numerical optimization method for high-throughput electron-beam–direct-write lithography,” Japanese Journal of Applied Physics, Volume 54, Number 6S1, 06FD01, May 2015 (SCI) [SCI, IF=1.491, Engineering 97/297=32.6% (Q2), Scopus]

5. Chun-Hung Liu, Philip C. W. Ng, Yu-Tian Shen, Sheng-Wei Chien, and Kuen-Yu Tsai*, “Impacts of point spread function accuracy on patterning prediction and proximity effect correction in low-voltage electron-beam-direct-write lithography,” Journal of Vacuum Science & Technology B (Top 20 Most Downloaded Articles, Feb. 2013), Volume 31, Issue 2, 021605, Feb. 2013 (SCI) [SCI, IF= 1.572, Electrical and Electronic Engineering 336/708 =47.4% (Q2), Scopus]

6. Hoi-Tou Ng, Yu-Tian Shen, Sheng-Yung Chen, Chun-Hung Liu, Philip C. W. Ng, and Kuen-Yu Tsai*, “New method of optimizing writing parameters in electron beam lithography systems for throughput improvement considering patterning fidelity constraints,” Journal of Micro/Nanolithography, MEMS, and MOEMS, Volume 11, Number 3, 033007, Sept. 2012 (SCI) [SCI, IF=1.22, Engineering 120/246=48% (Q2), Scopus]

7. Chun-Hung Liu, Hoi-Tou Ng, and Kuen-Yu Tsai*, “New parametric point spread function calibration methodology for improving the accuracy of patterning prediction in electron-beam lithography,” Journal of Micro-Nanolithography, MEMS, and MOEMS, Volume 11, Number 1, 013009, Mar. 2012 (SCI) [SCI, IF=1.22, Engineering 120/246=48% (Q2), Scopus]

8. Sheng-Yung Chen, Hoi-Tou Ng, Shiau-Yi Ma, Hsing-Hong Chen, Chun-Hung Liu, and Kuen-Yu Tsai*, “Lithography-patterning-fidelity-aware electron-optical system design optimization,” Journal of Vacuum Science & Technology B, Volume 29, Number 6, 06FD04, Dec. 2011 (SCI) [SCI, IF= 1.572, Electrical and Electronic Engineering 336/708 =47.4% (Q2), Scopus]

9. Sheng-Yung Chen, Kuen-Yu Tsai*, Philip C. W. Ng, Hoi-Tou Ng, Chun-Hung Liu, Yu-Tian Shen, Chieh-Hsiung Kuan, Yung-Yaw Chen, Yi-Hung Kuo, Cheng-Ju Wu, and Jia-Yush Yen, “In-situ beam drift detection using a two-dimensional electron beam position monitoring system for multiple-electron-beam–direct-write lithography,” Journal of Vacuum Science & Technology B, Volume 29, Number 4, 041607, Aug. 2011 (SCI) [SCI, IF= 1.572, Electrical and Electronic Engineering 336/708 =47.4% (Q2), Scopus]

10. H. Y. Chen and C. H. Liu, “Hybrid GPS/GSM Positioning Systems Design with Fuzzy Logic”, Journal of Advanced Computational Intelligence and Intelligent Informatics, Vol.12, No.3, pp.254-262, 2008. (SCI) [SCI, IF= 0.508, Artificial Intelligence 230/269 =85% (Q4), Scopus]

11. H. Y. Chen, C. H. Liu, and T. Y. Chou, “Fuzzy Logic with Applications to Hybrid GPS/GSM Positioning System Design”, Journal of Aeronautics, Astronautics and Aviation, Vol. 40, No.1, pp. 11-20, 2008. (EI)

 

國內期刊:​​

1. Chun-Hung Liu, Shun-Pin Yeh, Yu-Chien Wang, Wei-Lin Lai, Shang-Chi Shen, Ze-An Ding, Li-Ming Chu*, “Design of Reinforcement Learning Controller for Quadcopter in Flight Environment with Random Disturbance,” Green Science＆Technology Journal (ISSN: 2223-6961), Volume 13, Number 1, pp.45-54, May, 2023

​

國際會議論文:

1. Chun-Hung Liu*, Yen-Hua Tu, Cheng-En Wu, Chia-Han Chou, Ze-An Ding, Yun-Chin Li, Yu-Lin Chung, Sheng-Kai Wong, Yu-Tang Sun, Yu-Jun Zhong, Shuen-Ping Wang, “An innovative computational method for accelerating the calculation of parametric point spread function in electron beam lithography,” The 36th International Microprocesses and Nanotechnology Conference (MNC 2023), 17A-3-2, (oral presentation), Sapporo, Japan, Nov. 2023

2. Chun-Hung Liu*, Ze-An Ding, “A novel point-based MPC method for enhancing patterning performance in high-NA EUV ILT-curvilinear masks,” The 36th International Microprocesses and Nanotechnology Conference (MNC 2023), 17P-1-5, (poster presentation), Sapporo, Japan, Nov. 2023

3. Chun-Hung Liu*, Yu-Lin Chung, Sheng-Kai Wong, Yu-Tang Sun, Ze-An Ding, Yu-Jun Zhong, Yen-Hua Tu, Cheng-En Wu, Chia-Han Chou, Yun-Chin Li, Shuen-Ping Wang, “A surrounding-aware segment method to enhance computing performance in curvilinear mask process correction,” The 36th International Microprocesses and Nanotechnology Conference (MNC 2023), 17P-1-6, (poster presentation), Sapporo, Japan, Nov. 2023

4. Chun-Hung Liu*, Ze-An Ding, and Kuen-Yu Tsai, “A new model-based MPC for high-NA EUV mask imaging contrast enhancement,” The 35th International Microprocesses and Nanotechnology Conference (MNC 2022), 11P-4-5, (online oral-poster presentation), Tokushima, Japan, Nov. 2022

5. Chun-Hung Liu*, Shuen-Ping Wang, Ze-An Ding, Hsiang-Yi Hsieh, Yun-Chin Li, Chieh-Sheng Lee, AiLing Chang, Yi-Xuan Chen, Yung-Hsiang Chang, Yo-Sheng Tung, Bo-Wei Tsai, Chen-Kai Wen, Wei-Lun Lin, and Kai-Jun Weng, “A method to improve the pattern fidelity of parametric point spread function for High-NA EUV mask,” The 35th International Microprocesses and Nanotechnology Conference (MNC 2022), 11P-4-7, (online oral-poster presentation), Tokushima, Japan, Nov. 2022

6. Chun-Hung Liu*, Wei-Lin Lai, Shang-Chi Shen, Shun-Pin Yeh, Po-Cheng Wu, Yu-Chien Wang, and Guan-Yu Luo, “Impact of control strategies on altitude control in indoor quadcopter,” 2022 IET International Conference on Engineering Technologies and Applications (IET ICETA 2022), 5416, (poster presentation), Changhua, Taiwan, Oct. 2022

7. Chun-Hung Liu*, Hsing-Yi Hsieh, Yun-Chin Li, Chieh-Sheng Lee, Ze-An Ding, Ai-Ling Chang, Yi-Xuan Chen, Yung-Hsiang Chang, Wei-Yung Hsu, Shuen-Ping Wang, and Kuan-Fu Huang, “A new parametric point spread function at low keV for next generation EUV mask proximity modeling and correction,” The 65th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN 2022), PR-1, (online poster), New Orleans, Louisiana, USA, May. 2022

8. Chun-Hung Liu*, Hsiang-Yi Hsieh, Kuen-Yu Tsai, Shuen-Ping Wang, Kuan-Fu Huang, Wei-Yung Hsu, Fei-Ming Huang, Chih-Chiang Wu, Yun-Chin Li, Chieh-Sheng Lee, Po-Cheng Wu, Ze-An Ding, Yung-Hsiang Chang, Ai-Ling Chang, Yi-Xuan Chen, Fu-Chu Hsu, “Impact of electron scattering in EUV mask absorber materials,” The 47th edition on the Micro and Nano Engineering Conference (MNE2021), PA3, (online poster), Turin, Italy, Sep. 2021

9. Chun-Hung Liu*, Hsiang-Yi Hsieh, Chieh-Yu Mao, Shuen-Ping Wang, Kuan-Fu Huang, Fei-Ming Huang, Wei-Yung Hsi, Chih-Chiang Wu, Fu-Chu Hsu, Kuen-Yu Tsai, “Electron scattering investigation on advanced ArF and EUV masks with Monte Carlo method,” The 33th International Microprocesses and Nanotechnology Conference (MNC 2020), 2020-12-1 (online oral presentation), Osaka, Japan, Nov. 2020

10. Chun-Hung Liu*, Shih-Ming Chang, Chia-Hua Chang, Wen Lo, Hsin-Wei Wu, Chien-Cheng Chen, Alex Chen, Shuo-Yen Chou, Ru-Gun Liu, “Mask lithographic performance investigation with computational Monte-Carlo method on advanced mask patterning,” Advanced Lithography 2018 -- Proc. SPIE Vol. 10584, Novel Patterning Technologies 2018, 105841E, San Jose, California, USA, March 2018

11. Chien-Lin Lee, Sheng-Wei Chien, Sheng-Yung Chen, Chun-Hung Liu, Kuen-Yu Tsai*, Jia-Han Li, Bor-Yuan Shew, Chit-Sung Hong, Chao-Te Lee, “Fabrication of metrology test structures with helium ion beam direct write,” (Invited Talk) The 1st ZEISS Helium Ion Microscopy Summit, Beijing, China, Sept. 2017

12. Chien-Lin Lee, Sheng-Wei Chien, Sheng-Yung Chen, Chun-Hung Liu, Kuen-Yu Tsai*, Jia-Han Li, Bor-Yuan Shew, Chit-Sung Hong, Chao-Te Lee, “Fabrication of metrology test structures with helium ion beam direct write,” Advanced Lithography 2017 -- Proc. SPIE Vol. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI, 1014519, San Jose, California, USA, Feb. 2017

13. Hao-Yun Yu, Chun-Hung Liu, Yu-Tian Shen, Hsuan-Ping Lee, and Kuen-Yu Tsai*, “Improvement in electron-beam lithography throughput by exploiting relaxed patterning fidelity requirements with directed self-assembly,” Advanced Lithography 2014 -- Proc. SPIE Vol. 9049, Alternative Lithographic Technologies VI, 90492C, San Jose, California, USA, Feb. 2014

14. Yi-Yeh Yang, Hsuan-Ping Lee, Chun-Hung Liu, Hao-Yun Yu, Kuen-Yu Tsai*, Jia-Han Li, “Direct-scatterometry-enabled PEC model calibration with two-dimensional layouts,” Advanced Lithography 2014 -- Proc. SPIE Vol. 9050, Metrology, Inspection, and Process Control for Microlithography XXVIII, 905032, San Jose, California, USA, Feb. 2014

15. Chih-Yu Chen, Philip C. W. Ng, Chun-Hung Liu, Yu-Tian Shen, Kuen-Yu Tsai*, Jia-Han Li, Jason J. Shieh, and Alek C. Chen, “Direct-scatterometry-enabled optical-proximity-correction-model calibration,” Advanced Lithography 2013 -- Proc. SPIE Vol. 8681, Metrology, Inspection, and Process Control for Microlithography XXVII, 86810U, San Jose, California, USA, Feb. 2013

16. Yu-Tian Shen, Chun-Hung Liu, Chih-Yu Chen, Hoi-Tou Ng, Kuen-Yu Tsai*, Fu-Ming Wang, Chieh-Hsiung Kuan, Yen-Min Lee, Hsin-Hung Cheng, Jia-Han Li, and Alek C. Chen, “Electron-beam proximity effect model calibration for fabricating scatterometry calibration samples,” Advanced Lithography 2012 -- Proc. SPIE Vol. 8324, Metrology, Inspection, and Process Control for Microlithography XXVI, 83242K, San Jose, California, USA, Feb. 2012

17. Chun-Hung Liu, Philip Ng, Yu-Tian Shen, Hoi-Tou Ng, and Kuen-Yu Tsai*, “Impacts of point spread function calibration methods on model-based proximity effect correction for electron-beam-direct-write lithography,” The 54th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication, P2-17, Anchorage, Alaska, USA, Jun. 2010

18. Chun-Hung Liu, Pei-Lin Tien, Philip C. W. Ng, Yu-Tian Shen, and Kuen-Yu Tsai*, “Model-based proximity effect correction for electron-beam direct-write lithography,” Advanced Lithography 2010 -- Proc. SPIE 7637, 76371V, San Jose, California, USA, Feb. 2010

19. Hoi-Tou Ng, Chun-Hung Liu, Hsing-Hong Chen, Kuen-Yu Tsai*, “Determination of Gaussian beam and raster scan parameters in electron-beam-direct-write lithography considering device patterning and performance variability,” Lithography Asia 2009, 7520-99, Taipei, Taiwan, Nov. 2009

20. Chun-Hung Liu, Hoi-Tou Ng, Kuen-Yu Tsai*, “A new parametric proximity effect model calibration method for improving accuracy of post-lithography patterning prediction in sub-32-nm half-pitch low-voltage electron beam direct-write lithography,” The 53th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 2009, P-1F-17, Marco Island, Florida, USA, May 2009

21. Hoi-Tou Ng, Chun-Hung Liu, Hsing-Hong Chen, Kuen-Yu Tsai*, “Selection of Gaussian-beam and raster-scan parameters in electron-beam direct-write lithography considering device patterning and performance variability,” Advanced Lithography 2009, 7271-22 (oral presentation), San Jose, California, USA, Feb. 2009

22. Chun-Hung Liu, Hoi-Tou Ng, Philip C. W. Ng, Kuen-Yu Tsai*, Shy-Jay Lin, and Jeng-Horng Chen, “A novel curve-fitting procedure for determining proximity effect parameters in electron beam lithography,” Lithography Asia 2008 -- Proc. SPIE Vol. 7140, 71401I (oral presentation), Taipei, Taiwan, Nov. 2008

23. Chun-Hung Liu, Yea-Chin Yeh, Kuen-Yu Tsai*, Jia-Yush Yen, Arthur Tay, Jyh-Fa Lee, “Feedback Control of Piezo-Based Nanopositioning Systems for Semiconductor Manufacturing,” IFAC Workshop on Advanced Process Control for Semiconductor Manufacturing (oral presentation), Singapore, Dec. 2006

24. Yea-Chin Yeh, Chun-Hung Liu, Kuen-Yu Tsai*, Yu-Chen Kung, Jia-Yush Yen, and Jyh-Fa Lee, “Identifications of the PZT Actuated Novel Optical Scanning System,” IFAC Workshop on Advanced Process Control for Semiconductor Manufacturing (oral presentation), Singapore, Dec. 2006

25. Chen, Hsin-Yuan*, Liu, Chun-Hung and Ching-Ta Yu, “An Error Study on The GPS-Based Navigation,”AIAA Conference on Navigation , Guidance and Control (oral presentation), USA.2005

26. Chen, Hsin-Yuan*, Ching-Ta Yu and Liu, Chun-Hung “Neuro-Fuzzy Control Design with Robustness and Applications to Mobile Systems”, AIAA Conference on Navigation , Guidance and Control, USA.2005

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國內會議論文:

1. 劉俊宏*、葉舜斌、王昱健、賴威霖、沈尚錡、駱冠宇、朱力民* “Analysis of Various Control Strategies for Indoor Quadcopter Applications,” 2023 Conference of Research and Development in Technology Education (2023 CRDTE), N059, (Oral presentation), Kaohsiung, Taiwan, April 29, 2023

2. 劉俊宏*、賴威霖、沈尚錡、吳柏城、葉舜斌、王昱健 “混合式ZN-Fuzzy PID控制器調整策略並應用於四軸飛行器之精密姿態控制,” Conference on Precision Machinery and Manufacturing Technology 2022 (PMMT 2022), A009, Pingtung, Taiwan, May 21-22, 2022

3. 劉俊宏*、許馥竹、曾元彤、陳亭瑜、梁劭謙、沈尚錡、賴威霖、葉舜斌、王昱健、謝祥意 “四軸無人機之控制器設計與姿態模擬,” The Information Technology and Applications Conference 2021 (ITAC 2021), Sec. A, pp 112, Taipei, Taiwan, May 27, 2021

4. Chen, Hsin-Yuan*, Liu, Chun-Hung and Ching-Ta Yu, “Fast Passing over Steps with Unknown Height by a Variable Structure Type-Wheeled Robot”, National Symposium on Automatic Control, Taiwan, March 27, 2004

5. Chen, Hsin-Yuan*, Liu, Chun-Hung, and Ching-Ta Yu, “An Error Study on The GPS-Based Navigation”, National Symposium on Aeronautics and Astronautics, Taiwan, Dec. 12, 2004

6. Chen, Hsin-Yuan*, Ching-Ta Yu and Liu, Chun-Hung, “Neuro-Fuzzy Control Design with Robustness and Applications to Mobile Systems”, National Symposium on Aeronautics and Astronautics, Taiwan, Dec. 12, 2004

7. Chen, Hsin-Yuan* and Liu, Chun-Hung “GPS/GSM Positing System Design with Fuzzy Logic”, National Symposium on Aeronautics and Astronautics, Taiwan, Dec. 12, 2004

 

發明專利 (美國/台灣/中國大陸):

1. Chun-Hung Liu, Hsiang-Yi Hsieh (National Taipei University), “利用電子散射判斷材料能量反應的方法,” ROC (Taiwan) I812427, Aug. 2023

2. Shih-Ming Chang, Wen Lo, Chun-Hung Liu, Chia-Hua Chang, Hsin-Wei Wu, Ta-Wei Ou, Chien-Chih Chen, Chien-Cheng Chen (Taiwan Semiconductor Manufacturing Company, TSMC), “Dummy Insertion for Improving Throughput of Electron Beam Lithography,” United States Patent 11,526,081, Dec. 2022

3. Wen Lo, Shih-Ming Chang, Chun-Hung Liu (Taiwan Semiconductor Manufacturing Company, TSMC), “Semiconductor Apparatus and Method of Operating the Same,” United States Patent 11,467,488, Oct. 2022

4. Shih-Ming Chang, Wen Lo, Chun-Hung Liu, Chia-Hua Chang, Hsin-Wei Wu, Ta-Wei Ou, Chien-Chih Chen, Chien-Cheng Chen (Taiwan Semiconductor Manufacturing Company, TSMC), “Method for Electron Beam Lithography and Increasing Throughput (用于电子束微影及增加生产量的方法),” China CN110941149, Mar. 2022

5. Shih-Ming Chang, Wen Lo, Chun-Hung Liu, Chia-Hua Chang, Hsin-Wei Wu, Ta-Wei Ou, Chien-Chih Chen, Chien-Cheng Chen (Taiwan Semiconductor Manufacturing Company, TSMC), “Dummy Insertion for Improving Throughput of Electron Beam Lithography,” United States Patent 11,054,748, Jul. 2021

6. Shih-Ming Chang, Wen Lo, Chun-Hung Liu, Chia-Hua Chang, Hsin-Wei Wu, Ta-Wei Ou, Chien-Chih Chen, Chien-Cheng Chen (Taiwan Semiconductor Manufacturing Company, TSMC), “Method for Electron Beam Lithography and Increasing Throughput (用於電子束微影及增加生產量的方法),” ROC(Taiwan) I712866, Dec. 2020

7. Kuen-Yu Tsai*, Chun-Hung Liu (National Taiwan University/Taiwan Semiconductor Manufacturing Company, TSMC), “Method and System for Establishing Parametric Model (參數化模型的建立方法及系統),” ROC (Taiwan) I575392, Mar. 2017

8. Kuen-Yu Tsai*, Chun-Hung Liu (National Taiwan University/Taiwan Semiconductor Manufacturing Company, TSMC), “Method and System for Establishing Parametric Model,” United States Patent 9,418,049, Aug. 2016

9. Kuen-Yu Tsai*, Chun-Hung Liu, Chooi-Wan Ng, and Pei-Lin Tien (National Taiwan University), “Method for Compensating Proximity Effect of Particle Beam Lithography Process  (粒子束微影程序鄰近效應之補償方法),” ROC (Taiwan) I436174, May. 2014

10. Kuen-Yu Tsai*, Chun-Hung Liu, Chooi-Wan Ng, and Pei-Lin Tien (National Taiwan University), “Method for Compensating Proximity Effects of Particle Beam Lithography Processes,” United States Patent 8,539,392, Sept. 2013

 

專書 :

1. 劉俊宏，余浩澐，蔡坤諭, “讓摩爾定律成真的關鍵：微影技術 — 影響七十億以上個未來,” Dec. 2013, 臺大電機系科普系列

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Projects

1. (3年期) 112~115年度 科技部專題研究計畫–針對高數值孔徑極紫外光微影之光罩製像最佳化與性能極限研究 (主持人, 2023/08/01~2026/07/31, NSTC112-2221-E-305-011-MY3)

2. (3年期) 109~112年度 科技部專題研究計畫–應用於極紫外光微影之光罩製像增強方法設計 (主持人, 2020/05/01~2023/07/31, MOST109-2222-E-305-002-MY3)

3. 112年 國科會大專學生研究計畫–應用機器學習及曲線分割技術於極紫外光微影光罩之曲線式圖案製程效應修正 (指導教授, 112-2813-C-305-049-E)

4. 111年 科技部大專學生研究計畫–自動化調整光罩製程參數之技術研究並應用EUV光罩製像 (指導教授, 111-2813-C-143-021-E)

5. 110年 科技部大專學生研究計畫–應用蒙地卡羅模擬方法探討電子於光罩內之散射行為 (指導教授, 110-2813-C-143-025-E)

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Awards & Honors (學/業界)

1. 111學年度 國立臺北大學 學術研究傑出頒獎 – 發明專利獲准

2. 111學年度 國立臺北大學 English-Medium-Instruction (EMI)課程 績優獎勵

3. 111學年度第1學期 國立臺東大學教學意見高分課程 – 全校 第二名

4. 110學年度 國立臺東大學全校優良導師 – 全校 第一名

5. 110學年度第2學期 國立臺東大學教學意見高分課程 – 卓越獎 (全校 第一名)

6. 2022年 The 65th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN 2022), PR-1, (online poster), New Orleans, Louisiana, USA, May. 2022. 台灣唯一獲選團隊，其他獲選之美國名校團隊為 : Massachusetts Institute of Technology (MIT), California Institute of Technology (CIT), University of California, Berkeley (UCB), Stanford University。

7. 110學年度第1學期 國立臺東大學教學意見高分課程 – 卓越獎 (全校 第一名)

8. 109學年度第2學期 國立臺東大學教學意見高分課程 – 卓越獎 (全校 第一名)

9. 108~110學年度 國立臺東大學教學意見反映平均數高分課程 校前5~20 %科目。「機電系統與應用」、「光電元件」、「信號與系統」、「控制系統」、「普通物理(一)(二)」、「綠資實務見學」

10. 2019年 台積電公司 5奈米研發技術上線於投片產部門執行

11. 2018年 台積電公司 Advanced R&D 傑出表現獎 (tsmc R&D部門)

12. 2018年 台積電公司於美國國際光電工程學會前瞻微影會議 唯一論文發表(第一/通訊作者)

13. 2017年 台積電公司 7奈米研發技術上線於量產部門執行

14. 2013年 國立台灣大學 101 學年度  電機系碩博班 最佳博士論文獎 

15. 2013年 “The top 20 most downloaded papers” of Journal of Vacuum Science & Technology B

16. 2009年 美國 National Science Foundation (NSF) 獎學金

17. 2008年 台積電公司暑期實習競賽研發部門 首獎

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Competitions

1. 2023年 國立臺東大學綠資日–跨域整合專題成果競賽 - 第三名 “應用於極紫外光微影之光罩製像參數研究” 丁澤安、張愛翎 、陳奕璇、張詠翔。指導老師：劉俊宏博士、陳志全博士。Dec, 2023。

2. 2023年 國立臺東大學綠資日–跨域整合專題成果競賽 - 佳作 “應用人工智慧於四軸飛行載具之姿態控制器設計” 王昱健、葉舜斌。指導老師：劉俊宏博士、朱力民博士。Dec, 2023。

3. 2023年 國立臺北大學碩士生-李O瑾 獲國科會「補助國內研究生出席國際學術會議」。"第36屆國際微米製程與奈米技術會議 (日本 札幌)" 。(指導教授, NSTC-112-2922-I-305-004), Nov, 2023。

4. 2022年 國立臺東大學綠資日–跨域整合專題成果競賽 - 第一名 “新式參數化點擴散函數研究並應用於低加速電壓之次世代極紫外光微影光罩” 李昀瑾、李捷笙。指導老師：劉俊宏博士。Dec, 2022。

5. 2022年 國立臺東大學綠資日–跨域整合專題成果競賽 - 第三名 “多重控制策略應用於四軸無人飛行載具之高度姿態控制” 賴威霖、沈尚錡、吳柏城。指導老師：劉俊宏博士。Dec, 2022。

6. 2022年 國立臺東大學碩士生-謝O意 獲科技部「補助國內研究生出席國際學術會議」。"第65屆電子、離子和光子束技術與奈米製造國際會議 (美國 紐澳良)" 。(指導教授, MOST-111-2922-I-143-001), May, 2022。

7. 2022年 國立臺東大學理工學院學生學習成果競賽-生物與應用科學類組 - 優等 “混合式ZN-Fuzzy PID控制器調整策略並應用於四軸飛行器之精密姿態控制” 沈尚錡、賴威霖、吳柏城。指導老師：劉俊宏博士。May, 2022。

8. 2022年 國立臺東大學理工學院學生學習成果競賽-生物與應用科學類組 - 佳作 “適用於次世代極紫外光微影光罩鄰近效應之新式參數化點擴散函數” 李昀瑾、王舜平、李捷笙。指導老師：劉俊宏博士。May, 2022。

9. 2022年 國立臺東大學理工學院學生學習成果競賽-生物與應用科學類組 - 佳作 “應用於環境探測與建模之無人車型載具硬軟體建構與研製” 楊旻修、鄭瑞鈞、邱皓謙、鐘朝旭。指導老師：劉俊宏博士。May, 2022。

10. 2021年 國立臺東大學綠資日–跨域整合專題成果競賽 - 第三名 “結合PID控制器於四軸無人機之姿態模擬與動態性能研究” 許馥竹、陳亭瑜、梁劭謙、曾元彤。指導老師：劉俊宏博士。Dec, 2021。

11. 2021年 國立臺東大學理工學院學生學習成果競賽-生物與應用科學類組 - 優等 “結合PID控制器於四軸無人機之姿態模擬與動態性能研究” 許馥竹、梁劭謙、陳亭瑜、曾元彤。指導老師：劉俊宏博士。May, 2021。

12. 2021年 國立臺東大學理工學院學生學習成果競賽-生物與應用科學類組 - 佳作 “Study of electron scattering events using Monte Carlo simulation for advanced lithography masks,” 徐尉庸、黃飛鳴、吳志強、李昀瑾、李捷笙。指導老師：劉俊宏博士。May, 2021。

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Service (Chairperson, Committee, Reviewer)

1. 2023 Chinese Institute of Engineers (CIE) Student Paper Competition (CIE 2023) Reviewer & Examination Committee, Kaohsiung, Taiwan, June, 2023.

2. 2023 Master’s Thesis Committee, Student: Mr. Wu, Department of Applied Science, National Taitung University, Taiwan, Jan, 2023.

3. 2022 IET International Conference on Engineering Technologies and Applications (IET ICETA 2022) Reviewer, Changhua, Taiwan, Oct. 2022.

4. 2022 Master’s Thesis Committee, Student: Mr. Lu, Department of Applied Science, National Taitung University, Taiwan, July, 2022.

5. 2022 Master’s Thesis Committee, Student: Ms. Su, Department of Applied Science, National Taitung University, Taiwan, July, 2022.

6. 2022 Master’s Thesis Chairperson, Student: Mr. Hsieh, Department of Applied Science, National Taitung University, Taiwan, May, 2022.

7. 2021 PhD’s Dissertation Committee, Student: Mr. Lee, EDA division, Graduate Institute of Electronics Engineering, National Taiwan University, Taiwan, Oct, 2021.